EOTPR 2000 - Electro Optical Terahertz Pulsed Reflectometry

Electro Optical Terahertz Pulse Reflectometry (EOTPR) is an innovative time domain reflectometry (TDR) system that has been successfully developed by Intel Corporation and TeraView Ltd

It allows THz TDR analysis of semiconductor packages and offers a step change in resolution compared to conventional millimeter wave systems. The injected terahertz pulse reflects off faults within the device under test (DUT) locating their position with accuracy of 10 μm.

The unit is used to identify and quickly isolate faults on the interconnects of advanced packages, such as:

• Flip Chip
• Package on Package (PoP)
• Through-silicon Vias (TSV)

Specifications
Fault resolution	<10 microns
Rise time	Sub 6 ps
Signal to noise	94 dB
Testing range	Up to 150 mm

Key advantages of the EOTPR2000 system include:

• Non-destructive rapid fault isolation - minutes rather than days
• Ability to isolate faults unseen with other fault isolation technologies (ex.conventional TDR)
• Identification of weak connections that may lead to future faults
• Isolation of shorts, dead opens, and resistive opens
• 10 micron accuracy

Interconnect integrity in advanced integrated circuit packaging: flip chip